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The project

Metrology for trace water in ultra-pure process gases

Overview

Trace water is the single largest matrix contaminant in ultra-high purity (UHP) process gases. Even though the manufacturing of UHP gases serves many of the key technology areas, such as high-value semiconductor manufacturing, trace water measurements are still lacking measurement traceability in the relevant ranges and matrix gases.


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News / Events


22/12/2022
e-newsletter n°1

27/10/2022
Stakeholder survey

Last documents

14/11/2022
PROMETH2O
M18 PROMETH2O_WP4_v1

14/11/2022
PROMETH2O
M18 PROMETH2O WP0 Agenda_welcome

14/11/2022
PROMETH2O
M18 PROMETH2O_WP2