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The project

Metrology for trace water in ultra-pure process gases

Overview

Trace water is the single largest matrix contaminant in ultra-high purity (UHP) process gases. Even though the manufacturing of UHP gases serves many of the key technology areas, such as high-value semiconductor manufacturing, trace water measurements are still lacking measurement traceability in the relevant ranges and matrix gases.


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News / Events


30/01/2024
Gas analysis 2024


Lastest documents

26/09/2024
PROMETH2O
Final Publishable Project Report

26/09/2024
PROMETH2O
M36 Publishable Summary

31/05/2024
PROMETH2O
e-newsletter n°4